Fabrication of ultrahigh-density nanowires by electrochemical nanolithography

Abstract

An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 × 1011 cm-2 with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire… (More)
DOI: 10.1186/1556-276X-6-444

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@inproceedings{Chen2011FabricationOU, title={Fabrication of ultrahigh-density nanowires by electrochemical nanolithography}, author={Feng Chen and Hongquan Jiang and Arnold M. Kiefer and Anna M. Clausen and Yuk-Hong Ting and Amy Wendt and Bingjun Ding and Max G. Lagally}, booktitle={Nanoscale research letters}, year={2011} }