Fabrication of tunable diffraction grating by imprint lithography with photoresist mold.

@article{Yamada2018FabricationOT,
  title={Fabrication of tunable diffraction grating by imprint lithography with photoresist mold.},
  author={Itsunari Yamada and Yusuke Ikeda and Tetsuya Higuchi},
  journal={The Review of scientific instruments},
  year={2018},
  volume={89 5},
  pages={
          053110
        }
}
We fabricated a deformable transmission silicone [poly(dimethylsiloxane)] grating using a two-beam interference method and imprint lithography and evaluated its optical characteristics during a compression process. The grating pattern with 0.43 μm depth and 1.0 μm pitch was created on a silicone surface by an imprinting process with a photoresist mold to… CONTINUE READING