Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8.

Abstract

A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-linked material is mechanically robust, chemically resistant… (More)
DOI: 10.1364/OE.19.022910

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@article{Williams2011FabricationOT, title={Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8.}, author={Henry E. Williams and Daniel J Freppon and S. M. Kuebler and Raymond C. Rumpf and Marco A Melino}, journal={Optics express}, year={2011}, volume={19 23}, pages={22910-22} }