Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8.

@article{Williams2011FabricationOT,
  title={Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8.},
  author={Henry E. Williams and Daniel J. Freppon and S. M. Kuebler and Raymond C. Rumpf and Marco A Melino},
  journal={Optics express},
  year={2011},
  volume={19 23},
  pages={22910-22}
}
A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-linked material is mechanically robust, chemically resistant, and optically transparent. Yet, procedures commonly used to process SU-8, particularly spin-coating, are impractical when the intended… CONTINUE READING
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