Fabrication of tapered SU-8 structure and effect of sidewall angle for a variable focus microlens using EWOD

Abstract

Electrowetting on dielectric (EWOD) is a promising technology for variable focus liquid microlens. When an electrical field is applied across a liquid droplet and a dielectric layer, the contact angle of the liquid can be tuned with different applied voltages. Therefore, the focal length of a microlens would vary by simply applying an electrical field… (More)

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