Fabrication of taper hollow metallic microneedle array for portable drug delivery system

Abstract

In this paper, we demonstrated the detailed fabrication process of taper hollow metallic microneedle array through 2-layer SU-8 thick photoresist based backside exposure and Nickel electroplating techniques. We got microneedles with length in the range of 300 µm to 450 µm, and sharp tips with cone angles in the range of 4.6° to 5.7… (More)
DOI: 10.1109/NEMS.2010.5592495

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@article{Yu2010FabricationOT, title={Fabrication of taper hollow metallic microneedle array for portable drug delivery system}, author={Hao Yu and Ruxu Du and Yuhua Guo and Yingnan Wang and Si Di}, journal={2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems}, year={2010}, pages={676-679} }