Fabrication of single crystal silicon field emitter array on glass substrate

@article{Higa2001FabricationOS,
  title={Fabrication of single crystal silicon field emitter array on glass substrate},
  author={Kenneth Higa and T. Asano},
  journal={Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)},
  year={2001},
  pages={260-261}
}
We have demonstrated the fabrication and field emission characteristics of field emitter arrays using direct bonding between single-crystal silicon-emitter tips prepared by anodization and another silicon substrate. For application to display devices, it is necessary to fabricate tip arrays on transparent substrates. In this report, we demonstrate the… CONTINUE READING