Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography

@inproceedings{Lee2006FabricationON,
  title={Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography},
  author={Heon Lee and Seung Han Hong and Kiyeon Yang and Kyungwoo Choi},
  year={2006}
}

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