Fabrication of microchannels using polycarbonates as sacrificial materials

  title={Fabrication of microchannels using polycarbonates as sacrificial materials},
  author={Hollie Reed and Celesta E. White and V. R. K. Rao and Sue Ann Bidstrup Allen and Clifford L. Henderson and Paul A. Kohl},
  journal={Journal of Micromechanics and Microengineering},
  • H. Reed, C. E. White, P. Kohl
  • Published 1 November 2001
  • Materials Science, Engineering
  • Journal of Micromechanics and Microengineering
The use of polycarbonates as thermally decomposable, sacrificial materials for the formation of microchannels is presented. Polycarbonates decompose in the temperature range of 200-300 °C. Two polycarbonates, polyethylene carbonate and polypropylene carbonate, have been used to fabricate microchannels in three different types of encapsulants: an inorganic glass (silicon dioxide), a thermoplastic polymer (Avatrel dielectric polymer) and a thermoset polymer (bisbenzoycyclobutene Cyclotene 3022-57… 

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