Fabrication of micro-lenses in quartz

Abstract

A one-step micromachining process, which utilizes laser assisted chemical wet etching is applied for the fabrication of plano-convex micro-lens arrays in quartz, which are used as beam homogenizers for high power lasers. 

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Cite this paper

@article{Lippert2005FabricationOM, title={Fabrication of micro-lenses in quartz}, author={Thomas Lippert and G. Kopitkovas and Catherine David and Alexander Wokaun and J. Gobrecht}, journal={2005 Pacific Rim Conference on Lasers & Electro-Optics}, year={2005}, pages={1623-1624} }