Fabrication of indium tin oxide film with controllable surface morphology via oxygen participant electron-beam evaporation technique

Abstract

The ITO film as the transparent conductive layer in gallium nitride based light emitting diodes (LEDs) can improve effectively current spreading and is widely applied. In this paper, ITO films with different morphologies have been obtained through different evaporation conditions. By adjusting oxygen flow in the process of evaporation, nanorod, cellular… (More)

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Cite this paper

@article{Shen2013FabricationOI, title={Fabrication of indium tin oxide film with controllable surface morphology via oxygen participant electron-beam evaporation technique}, author={Yan Shen and Qing Liu and Zhiyuan Zuo and Mingsheng Xu and Huan Liu and Ying Wang and Xiangang Xu and Kai Jiang and Muqing Zhang and Xiaobo Hu}, journal={2013 10th China International Forum on Solid State Lighting (ChinaSSL)}, year={2013}, pages={219-222} }