Fabrication of hydrophobic inorganic coatings on natural lotus leaves for nanoimprint stamps

  title={Fabrication of hydrophobic inorganic coatings on natural lotus leaves for nanoimprint stamps},
  author={Shu-xi Dai and Wanyong Ding and Yang Wang and Dianbo Zhang and Zuliang Du},
  journal={Thin Solid Films},
Hydrophobic inorganic films were obtained by direct deposition of copper or silicon onto natural lotus leaves by ion beam sputtering deposition technique. Scanning electron microscopy observations showed a lotus-leaf-like surface structure of the deposited inorganic films. Hydrophobic nature of the inorganic films on lotus leaves had been improved compared to the inorganic films deposited on flat silicon substrates. Water contact angles measured on the lotus-leaf-like copper and silicon films… 
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  • Engineering, Materials Science
    2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
  • 2017
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