Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

  title={Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser},
  author={Zhiwei Fang and Ni Yao and Min Wang and Jintian Lin and Jianhao Zhang and Rongbo Wu and Lingling Qiao and Wei Fang and Tao Lu and Ya Cheng},
  journal={International Journal of Optomechatronics},
  pages={47 - 54}
  • Z. Fang, Ni Yao, Ya Cheng
  • Published 2 January 2017
  • Physics
  • International Journal of Optomechatronics
ABSTRACT We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip. 

Ultra-low loss lithium niobate photonics

We report fabrication and characterization of ultra-low loss optical waveguides and optical micro-resonators on lithium niobate on insulator with excellent surface qualities. We demonstrate

High-Q Exterior Whispering-Gallery Modes in a Double-Layer Crystalline Microdisk Resonator.

This work demonstrates highly localized WGMs in the nanoair gap of a double-layer crystalline microdisk that possesses a high quality factor in excess of 10^{5} without metallic loss and can be highly favored in various applications including optical sensing, nonlinear optics, and optomechanics.

A comparative study of dry-etching nanophotonic devices on a LiNbO3-on-insulator material platform

Three different novel dry-etching methods have been employed to fabricate nanophotonic devices upon a thin-film lithium niobate on insulator material platform. Different dry-etching processes and

Integrated lithium niobate photonics

Abstract Lithium niobate (LiNbO3) on insulator (LNOI) is a promising material platform for integrated photonics due to single crystal LiNbO3 film’s wide transparent window, high refractive index, and

Advances in lithium niobate photonics: development status and perspectives

Abstract. Lithium niobate (LN) has experienced significant developments during past decades due to its versatile properties, especially its large electro-optic (EO) coefficient. For example, bulk

Polygon Coherent Modes in a Weakly Perturbed Whispering Gallery Microresonator for Efficient Second Harmonic, Optomechanical, and Frequency Comb Generations.

High optical quality factor polygonal and star coherent optical modes in a lithium niobate microdisk are observed with weak perturbation from a tapered fiber and optomechanical oscillation in polygon modes for the first time is observed.

Three-Dimensional Photonic Circuits in Rigid and Soft Polymers Tunable by Light

Polymeric matrices offer a wide and powerful platform for integrated photonics, complementary to the well-established silicon photonics technology. The possibility to integrate, on the same chip,

Optically Tunable Photoluminescence and Up-Conversion Lasing on a Chip

The ability to tune the wavelength of light emission on a silicon chip is important for scalable photonic networks, distributed photonic sensor networks, and next generation computer architectures.

Phase-matched second-harmonic generation in coupled nonlinear optical waveguides

Phase matching is crucial for effective nonlinear frequency conversion. Recent advances in photonic miniaturization greatly promote implementations of efficient nonlinear frequency conversion in

Recent Advances in Femtosecond Laser Processing of LiNbO3 Crystals for Photonic Applications

Femtosecond laser pulses have been extensively employed to achieve 3D micro‐ and nanofabrication in various materials for a broad variety of applications. LiNbO3 crystal is a multifunctional material



Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

We report on fabrication of high-Q (i.e., a quarter million) lithium niobate whispering-gallery-mode microresonators using femtosecond laser micromachining. Second harmonic generation with a

Integrated high quality factor lithium niobate microdisk resonators.

Lithium Niobate microdisk resonators that feature optical quality factor ~10(5) are demonstrated using robust and scalable fabrication techniques, that operate over a wide wavelength range spanning visible and near infrared.

High-Q double-disk microcavities for cavity optomechanics.

We design a double-disk microcavity consisting of a pair of silica microdisks separated by a nanoscale gap region on a silicon chip for cavity optomechanics. We show that this type of photonic

On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes.

Electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes with a high electro-optical tuning coefficient is demonstrated.

High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation.

Electro-optic modulation with an effective resonance-frequency tuning rate of 3.0 GHz/V was demonstrated in the fabricated LN microdisk resonator.

Second harmonic generation in a high-Q lithium niobate microresonator fabricated by femtosecond laser micromachining

We report on second harmonic generation (SHG) in on-chip high-Q (>105) lithium niobate (LiNbO3, LN) microresonators fabricated by femtosecond laser micromachining. We examine the efficiency of SHG

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth

Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining.

We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional micromachining. The main fabrication procedures include the fabrication of

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing.

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond

Direct laser writing of whispering gallery microcavities by two-photon polymerization

We demonstrate that high-Q polymer whispering gallery microcavities can be directly written by the two-photon polymerization of zirconium/silicon hybrid sol-gel, benefiting from the high spatial