Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

@article{Fang2017FabricationOH,
  title={Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser},
  author={Zhiwei Fang and Ni Yao and Min Wang and Jintian Lin and Jianhao Zhang and Rongbo Wu and Lingling Qiao and Wei Fang and Tao Lu and Ya Cheng},
  journal={International Journal of Optomechatronics},
  year={2017},
  volume={11},
  pages={47 - 54}
}
  • Z. Fang, Ni Yao, Ya Cheng
  • Published 2 January 2017
  • Physics
  • International Journal of Optomechatronics
ABSTRACT We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip. 
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