Fabrication of gratings using photosensitive gel films by He-Cd lasers

@inproceedings{Zhao2007FabricationOG,
  title={Fabrication of gratings using photosensitive gel films by He-Cd lasers},
  author={Gaoyang Zhao and Zhezhe Wang and Weihua Zhang},
  year={2007}
}
Photosensitive ZrO 2 /BzAc gel films on silicon and quartz substrates with chelate complexes as precursors are fabricated using the sol-gel method. The characteristics of UV and IR spectra of the photosensitive gel films, and their variations in the process of laser irradiation and heat treatment, are investigated. Given different incident angles, the gratings with different pitches are fabricated by interference of two coherent beams of a 325-nm He-Cd laser in ZrO 2 /BzAc photosensitive gel… CONTINUE READING