Fabrication of gap-optimized CMUT

@article{Ahrens2002FabricationOG,
  title={Fabrication of gap-optimized CMUT},
  author={Olaf Ahrens and A. Buhrdorf and Dennis Hohlfeld and L. Tebje and Johann Binder},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2002},
  volume={49},
  pages={1321-1329}
}
A recently introduced set up of capacitive micromachined ultrasonic transducers (cMUT) combines a conductive membrane above a structured sacrificial layer. All previous approaches either require an additional metallic electrode or do not possess a structured sacrificial layer and, consequently, may make exact adjustment of the membrane dimensions difficult. The present set ups are especially suited for the fabrication of cMUT with gap heights ranging between 50 nm and 2 /spl mu/m between the… CONTINUE READING
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