Fabrication of add-drop filters based on frequency-matched microring resonators

@article{Barwicz2006FabricationOA,
  title={Fabrication of add-drop filters based on frequency-matched microring resonators},
  author={Tymon Barwicz and M. A. Popovic and M. R. Watts and P. Rakich and E. P. Ippen and H. I. Smith},
  journal={Journal of Lightwave Technology},
  year={2006},
  volume={24},
  pages={2207-2218}
}
Frequency mismatches between resonators significantly impact the spectral responses of coupled resonator filters, such as high-order microring filters. In this paper, techniques allowing fabrication of frequency-matched high-index-contrast resonators are proposed, demonstrated, and analyzed. The main approach consists of inducing small dimensional changes in the resonators through alteration of the electron-beam dose used to expose either the actual resonator on a wafer or its image on a… CONTINUE READING
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