Fabrication of a single-crystal Bragg mirror for solidly-mounted resonators and transducers

Abstract

In this work, we propose a Bragg mirror for Quartz resonator at 10MHz. Two processes based on bonding and thinning wafers is proposed. A stack of ten bonding and thinning wafers is realized. Ultrasonic characterization shows the behavior of the Bragg mirror and the evolution versus the number of layer stack. Resonators on such Bragg mirror show less… (More)

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Cite this paper

@article{Baron2012FabricationOA, title={Fabrication of a single-crystal Bragg mirror for solidly-mounted resonators and transducers}, author={T. Baron and E. Lebrasseur and Sex0301bastien Alzuaga and Haixia Wang and Florent Bassignot and Jean-Jacques Boy and Sylvain Ballandras and Laurent Couteleau}, journal={2012 IEEE International Ultrasonics Symposium}, year={2012}, pages={543-546} }