Fabrication of a PMMA Torsional Micromirror Device Based on Hot Embossing Process

Abstract

This paper reports the fabrication of a PMMA torsional micromirror device using hot embossing and ultra-precision machining. The mirror is operated based on electrostatic vertical comb-drive actuators. The fabrication process is described as followings. First, two-stepped silicon mold is fabricated from silicon wafer by photolithography and ICP-RIE. Next… (More)

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