Fabrication of a CMOS-compatible surface acoustic wave device for application in pathogen sensing

@article{Ten2014FabricationOA,
  title={Fabrication of a CMOS-compatible surface acoustic wave device for application in pathogen sensing},
  author={Seng Teik Ten and Uda Hashim and Fatima Dawood. Malek and Uda. Hashim and Kok Leei Foo and Chun Hong Voon and F. H. Wee and Young Sil Lee and H. Norul Hisham and Amirul Husna bin Sudin and M. S. Nur Humaira},
  journal={2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)},
  year={2014},
  pages={384-387}
}
Surface acoustic waves (SAW) devices have been initially developed and used for the high-volume low-cost TV component. Due to the ultra-sensitivity to the surface perturbation, SAW based devices have been modified to be sensors. Initially, SAW based sensors were developed for gas detection and recently they have been moving towards biological detection. Shear horizontal surface acoustic wave (SHSAW), one of the SAW based type is most suitable for the application in liquid based condition. Ultra… CONTINUE READING

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