Fabrication of Silicon on Lattice-Engineered Substrate (SOLES) as a Platform for Monolithic Integration of CMOS and Optoelectronic Devices

@article{Dohrman2006FabricationOS,
  title={Fabrication of Silicon on Lattice-Engineered Substrate (SOLES) as a Platform for Monolithic Integration of CMOS and Optoelectronic Devices},
  author={C. L. Dohrman and K. Chilukuri and D. Isaacson and M. L. Lee and E. A. Fitzgerald},
  journal={2006 International SiGe Technology and Device Meeting},
  year={2006},
  pages={1-2}
}
We report the fabrication of a novel substrate platform for the monolithic integration of Si-based CMOS and GaAs-based optoelectronic devices. This platform, which we refer to as silicon on lattice-engineered substrate (SOLES), consists of a compositionally graded SiGe buffer buried underneath a silicon-on-insulator (SOI) structure, all fabricated on a Si substrate