Fabrication of SOI micromechanical devices: Dissertation

@inproceedings{Kiihamki2005FabricationOS,
  title={Fabrication of SOI micromechanical devices: Dissertation},
  author={Jyrki Kiiham{\"a}ki},
  year={2005}
}

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MEMS based voltage references

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Electrical Contacts in SOI MEMS Using Aerosol Jet Printing

  • IEEE Journal of the Electron Devices Society
  • 2018
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