Fabrication of Large-Area Three-Dimensional Microstructures on Flexible Substrates by Microtransfer Printing Methods

@article{Huang2012FabricationOL,
  title={Fabrication of Large-Area Three-Dimensional Microstructures on Flexible Substrates by Microtransfer Printing Methods},
  author={Chi-Chieh Huang and Xuefeng Zeng and Hongrui Jiang},
  journal={Journal of Microelectromechanical Systems},
  year={2012},
  volume={21},
  pages={749-755}
}
This paper presents two robust microtransfer printing methods, namely, multiple transfer printing and peeling microprinting methods, to fabricate three-dimensional (3-D) and high-aspect-ratio microelectromechanical systems (MEMS) structures over large areas on flexible polydimethylsiloxane (PDMS) substrates. These techniques enable conformal wrapping of 3-D microstructures, initially fabricated in two-dimensional (2-D) layouts with standard fabrication technology onto a wide range of surfaces… CONTINUE READING

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