Fabrication of Efficient Single‐Emitter Plasmonic Patch Antennas by Deterministic In Situ Optical Lithography using Spatially Modulated Light

@article{Dhawan2022FabricationOE,
  title={Fabrication of Efficient Single‐Emitter Plasmonic Patch Antennas by Deterministic In Situ Optical Lithography using Spatially Modulated Light},
  author={Amit R Dhawan and Michel Nasilowski and Zhiming Wang and Benoit Dubertret and Agn{\`e}s Ma{\^i}tre},
  journal={Advanced Materials},
  year={2022},
  volume={34}
}
Single‐emitter plasmonic patch antennas are room‐temperature deterministic single‐photon sources, which exhibit highly accelerated and directed single‐photon emission. However, for efficient operation these structures require 3D nanoscale deterministic control of emitter positioning within the device, which is a demanding task, especially when emitter damage during fabrication is a major concern. To overcome this limitation, the deterministic room‐temperature in situ optical lithography… 

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