Fabrication of 3-D submicron glass structures by FIB

  title={Fabrication of 3-D submicron glass structures by FIB},
  author={C H Chao and C. T. Pan and J. R. Wu},
  journal={2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems},
The fabrication characteristic of focused ion beam (FIB) for Pyrex glass was investigated. FIB has several advantages such as high sensitivity, high material removal rates, low forward scattering and direct fabrication in selective area without any etching mask, etc. In this study, FIB etched Pyrex glass was used for fast fabrication of 3D submicron… CONTINUE READING