Fabrication of 2D sub-micron structures in lithium niobate for photonic crystal applications

@inproceedings{Grilli2005FabricationO2,
  title={Fabrication of 2D sub-micron structures in lithium niobate for photonic crystal applications},
  author={S. Grilli and P. Ferraro and L. Sansone and B. Tiribilli and M. Vassalli and P. De Natale},
  booktitle={SPIE Optics + Photonics},
  year={2005}
}
We report on the fabrication and characterization of the first periodic sub-micron scale one- and two-dimensional surface structures in congruent 500 μm thick lithium niobate crystal samples. Structures with periods from 2 μm down to 500 nm, lateral feature sizes down to 200 nm and depths around 10 μm, largely compatible with conventional waveguide fabrication, have been obtained. Such structures are fabricated by selective wet etching of ferroelectric domain engineered samples obtained by… Expand
Micro- and nano-domain engineering in lithium niobate
The physical basis of the domain engineering in ferroelectrics and its application to lithium niobate crystals were reviewed. The unified kinetic approach to the domain structure evolution inExpand
Domain Structure Fabrication in Z and Y-cuts of LiTaO3 Crystals by Point e-beam Writing in the SEM
In this work, a set of local electron irradiations has been used to fabricate domain gratings in conventional lithium tantalate crystals. The Z and Y-cuts of the crystals were irradiated in the SEMExpand
Etching lithium niobate during Ti diffusion process
  • V. Sivan, L. Bui, +4 authors A. Mitchell
  • Materials Science, Engineering
  • SPIE Micro + Nano Materials, Devices, and Applications
  • 2007
We present a novel method of etching lithium niobate during the Ti diffusion process. A hypothesis for this etching process is explained by defining the kinetics of the Ti diffusion process as anExpand
Modeling of multiple-optical-axis pattern-integrated interference lithography systems.
TLDR
The image quality and collimation in a multiple-optical-axis pattern-integrated interference lithography system are evaluated for an elementary optical system composed of single-element lenses and reasonable fidelity is shown to be possible. Expand
Surface machining lithium niobate using Ti diffusion technique
  • Sivan
  • Materials Science
  • 2009
The thesis presents a novel technique for realizing smooth micro-scale etched features on lithium niobate. Etching of lithium niobate is observed when annealing two wafers in contact with anExpand
Reversible Fragmentation and Self‐Assembling of Nematic Liquid Crystal Droplets on Functionalized Pyroelectric Substrates
open in browser PRO version Are you a developer? Try out the HTML to PDF API Watch Ferraro-ino Channel ___________________________________________________________________________________ ▼Expand

References

SHOWING 1-10 OF 34 REFERENCES
Investigation on reversed domain structures in lithium niobate crystals patterned by interference lithography.
We demonstrate fabrication of periodically poled lithium niobate samples by electric field poling, after patterning by interference lithography. Furthermore we investigate the poling process at anExpand
Fabrication of band-gap structures in planar nonlinear waveguides for second harmonic generation
The work presented here deals with the design and fabrication of the linear grating on a LiNbO3 planar waveguide to obtain an efficient second harmonic generation operating in Cerenkov configuration.Expand
Semiconductor photonic crystals for optoelectronics
Abstract We present a number of designs for the integration of photonic crystals (PC) with active semiconductor devices. As a first step, the use of PC blocks as laser mirrors is demonstrated.Expand
Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment
One and two dimensional structures at the submicrometer scale have been realized on lithium niobate using an innovative technique: the electron beam bombardment associated to chemical etching. TheExpand
Photonic Crystals: Molding the Flow of Light
Since it was first published in 1995, Photonic Crystals has remained the definitive text for both undergraduates and researchers on photonic band-gap materials and their use in controlling theExpand
Surface domain engineering in congruent lithium niobate single crystals: A route to submicron periodic poling
We describe a technique for surface domain engineering in congruent lithium niobate single crystals. The method is based on conventional electric-field poling, but involves an intentional overpolingExpand
Quasi-phase-matched optical parametric oscillators in bulk periodically poled LiNbO 3
We review progress in quasi-phase-matched optical parametric oscillators in bulk periodically poled LiNbO3. Using the electric-field poling process, we can reliably fabricate 0.5-mm-thick crystalsExpand
Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatialExpand
Full three-dimensional photonic bandgap crystals at near-infrared wavelengths
TLDR
An artificial crystal structure has been fabricated exhibiting a full three-dimensional photonic bandgap effect at optical communication wavelengths, encouraging us to create an ultra-small optical integrated circuit including a three- dimensional photonic crystal waveguide with a sharp bend. Expand
High Quality Two-Dimensional Photonic Crystal Slab Cavities
We have fabricated and characterized donor-mode nanocavities formed by a single defect cavity defined within a two-dimensional photonic crystal slab. Quantum dots emitting in the 1.1–1.3 micron rangeExpand
...
1
2
3
4
...