Fabrication of 2D sub-micron structures in lithium niobate for photonic crystal applications

  title={Fabrication of 2D sub-micron structures in lithium niobate for photonic crystal applications},
  author={S. Grilli and P. Ferraro and L. Sansone and B. Tiribilli and M. Vassalli and P. De Natale},
  booktitle={SPIE Optics + Photonics},
We report on the fabrication and characterization of the first periodic sub-micron scale one- and two-dimensional surface structures in congruent 500 μm thick lithium niobate crystal samples. Structures with periods from 2 μm down to 500 nm, lateral feature sizes down to 200 nm and depths around 10 μm, largely compatible with conventional waveguide fabrication, have been obtained. Such structures are fabricated by selective wet etching of ferroelectric domain engineered samples obtained by… Expand
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  • SPIE Micro + Nano Materials, Devices, and Applications
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