Fabrication challenge, device characterization of high-Q 2D, 3D passives devices on glass

Abstract

It is demonstrated that the high quality factor of thick metal spiral inductors, 3D solenoid inductor and low harmonics power level can be achieved by using a mature glass substrate technology. The quality factor of inductors in a 2D/3D type can achieve 70∼100 in this study. The harmonics power level is measured along transmission line and 2nd /3rd… (More)

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Cite this paper

@article{Hsieh2016FabricationCD, title={Fabrication challenge, device characterization of high-Q 2D, 3D passives devices on glass}, author={Sheng-Chi Hsieh and Chien-Hua Chen and Yung-Shun Chang and Teck Chong Lee and Pao-Nan Lee and Chen-Chao Wang and Yuan-Hsi Chou}, journal={2016 IEEE Electrical Design of Advanced Packaging and Systems (EDAPS)}, year={2016}, pages={75-77} }