Fabrication and testing of three-dimensional stages providing displacement of up to 8 /spl mu/m

@article{Ando2005FabricationAT,
  title={Fabrication and testing of three-dimensional stages providing displacement of up to 8 /spl mu/m},
  author={Yoshinobu Ando},
  journal={The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.},
  year={2005},
  volume={1},
  pages={741-744 Vol. 1}
}
  • Yoshinobu Ando
  • Published 2005 in
    The 13th International Conference on Solid-State…
We have designed and fabricated 3D stages driven by electrostatic comb actuators, which are to be substituted for a PZT tube scanner in a scanning probe microscope (SPM) system. The 3D stage consisted of traveling tables, suspensions and comb actuators, which were fabricated in 20 /spl mu/m-silicon-layer on an SOI (silicon on insulator) wafer using a DRIE (deep reactive ion etching) process. The DRIE process was also used to form inclined leaf springs in the suspensions. The 3D stage was… CONTINUE READING