Fabrication and testing of a large area, high density, parylene MEMS µECoG array

  title={Fabrication and testing of a large area, high density, parylene MEMS µECoG array},
  author={Peter Ledochowitsch and R. J. Felus and Robert R. Gibboni and Ayumu Miyakawa and Shanshan Bao and Michel M. Maharbiz},
  journal={2011 IEEE 24th International Conference on Micro Electro Mechanical Systems},
We report the design, microfabrication and testing of a flexible 256-electrode array for micro-electrocorticography (µECoG) with an electrode pitch of 500 µm. Our µECoG grid is a flexible five-layer parylene MEMS device (two layers of platinum insulated by three layers of parylene) featuring plasma-etched vias and a monolithically integrated parylene cable which is compression-bonded to a fan-out board using anisotropic conductive film (ACF) technology. We have characterized the device by… CONTINUE READING
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