Fabrication and field emission property of a Si nanotip array.
@article{Huang2006FabricationAF,
title={Fabrication and field emission property of a Si nanotip array.},
author={G. S. Huang and X. L. Wu and Y. C. Cheng and X. Li and Suhua Luo and Tao Feng and Paul K. Chu},
journal={Nanotechnology},
year={2006},
volume={17 22},
pages={
5573-6
}
}Using a Si-based porous anodic alumina membrane as a mask, we demonstrate a way to pattern Si surface. After removing the SiO(2) nanoislands formed during anodization of the Al/Si interface, we obtain a Si nanotip array on the surface of a Si wafer. This array shows an excellent field emission property with a low turn-on field of 8.5 V µm(-1). The Fowler-Nordheim plot obtained is linearly dependent, indicating that the emission current arises from the quantum tunnelling effect. The Si nanotip…
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