Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II

Abstract

This paper, the second of two parts, presents extensive measurement and characterization results on fabricated thermally actuated single-crystal silicon MEMS resonators analyzed in part I. The resonators have been fabricated using a single mask process on SOI substrates. Resonant frequencies in a few hundreds of kHz to a few MHz and equivalent motional… (More)

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