Fabrication and characterization of surface micromachined CMUT with a bossed membrane

@article{Wang2008FabricationAC,
  title={Fabrication and characterization of surface micromachined CMUT with a bossed membrane},
  author={Mengli Wang and Jingkuang Chen and Xiaoyang Cheng and Chuan Li and Xueyuan Liu},
  journal={2008 IEEE Ultrasonics Symposium},
  year={2008},
  pages={394-397}
}
This paper describes the fabrication and characterization of surface-micromachined capacitive ultrasonic transducers with a bossed membrane. The boss was formed using 3mum-thick deposited tetraethoxysilane (TEOS) oxide on top of a suspended polysilicon membrane. This same oxide layer was also used to seal the release holes along the peripheral of the polysilicon membrane. No extra mask or processing step in addition to that used for fabricating planar-membrane capacitive micromachined… CONTINUE READING