Fabrication and characterization of superconducting circuit QED devices for quantum computation

@article{Frunzio2005FabricationAC,
  title={Fabrication and characterization of superconducting circuit QED devices for quantum computation},
  author={Luigi Frunzio and Andreas Wallraff and David I. Schuster and J. Majer and Robert J. Schoelkopf},
  journal={IEEE Transactions on Applied Superconductivity},
  year={2005},
  volume={15},
  pages={860-863}
}
We present fabrication and characterization procedures of devices for circuit quantum electrodynamics (cQED). We have made 3-GHz cavities with quality factors in the range 10/sup 4/-10/sup 6/, which allow access to the strong coupling regime of cQED. The cavities are transmission line resonators made by photolithography. They are coupled to the input and output ports via gap capacitors. An Al-based Cooper pair box is made by e-beam lithography and Dolan bridge double-angle evaporation in… 

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