Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities.

@article{Khan2011FabricationAC,
  title={Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities.},
  author={Mughees M. Khan and Thomas M. Babinec and Murray W. McCutcheon and Parag B. Deotare and Marko Lon{\vc}ar},
  journal={Optics letters},
  year={2011},
  volume={36 3},
  pages={421-3}
}
We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our… CONTINUE READING