Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range

This paper presents the design, fabrication, and characterization of MEMS airgap-based optical filters designed for the ultraviolet (UV) spectral range. Optical design, process conditions, and material choice have been optimized for obtaining large-area and optically flat membranes. Several distributed Bragg reflectors centered at λ=400 nm were designed… CONTINUE READING