Fabrication and analysis of Si/SiO2 micro-mechanical modulators

@article{Patterson1996FabricationAA,
  title={Fabrication and analysis of Si/SiO2 micro-mechanical modulators},
  author={Jenny Patterson and Bart Van Zeghbroeck},
  journal={Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing},
  year={1996},
  pages={65-66}
}
We report on a new and inexpensive fabrication technique for micro-mechanical electrically tunable modulators. The modulators consist of thermally grown silicon dioxide (SiO/sub 2/) cantilever structures fabricated on a