Fabrication Techniques for Multilayer Metalization and Patterning, and Surface Mounting of Components on Cylindrical Substrates for Tube-Shaped Micro-Tools

Abstract

This paper reports fabrication techniques for multilayer microstructures and surface mounting of small components on cylindrical substrates for tube-shaped high-performance micro-tools. A cylindrical shape is an ideal shape for micro medical tools inserted temporarily or implanted in the human body. Miniaturization, multifunctional capabilities, and high… (More)

Cite this paper

@article{Goto2006FabricationTF, title={Fabrication Techniques for Multilayer Metalization and Patterning, and Surface Mounting of Components on Cylindrical Substrates for Tube-Shaped Micro-Tools}, author={S. Goto and T. Matsunaga and J. J. Chen and Wataru Makishi and Masayoshi Esashi and Y. Haga}, journal={2006 International Conference on Microtechnologies in Medicine and Biology}, year={2006}, pages={217-220} }