Fabrication, optimization and application of complementary Multiple-Gate Tunneling FETs

  title={Fabrication, optimization and application of complementary Multiple-Gate Tunneling FETs},
  author={M. Fulde and Alexander Heigl and Mario Weis and Martin Wirnshofer and Klaus von Arnim and Th Nirschl and Marie T. Sterkel and Gerhard Knoblinger and Walter Hansch and Gerhard Wachutka and Doris Schmitt-Landsiedel},
  journal={2008 2nd IEEE International Nanoelectronics Conference},
We present fabrication, optimization and application aspects of complementary Multiple-Gate Tunneling FETs (MuGTFETs). Tunneling FETs are implemented in a MuGFET technology for the first time. N- and p-type tunneling currents are observed within a single device structure. Digital and analog device performance is analyzed. Measured devices show low on currents in the tens of nA regime due to not optimized doping profiles. However, promising analog characteristics are obtained with intrinsic gain… CONTINUE READING
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