Fabricating centimeter-scale high quality factor two-dimensional periodic photonic crystal slabs.

@article{Lee2014FabricatingCH,
  title={Fabricating centimeter-scale high quality factor two-dimensional periodic photonic crystal slabs.},
  author={Jeongwon Lee and Bo Zhen and S. Chua and Ofer Shapira and Marin Solja{\vc}i{\'c}},
  journal={Optics express},
  year={2014},
  volume={22 3},
  pages={3724-31}
}
We present a fabrication route for centimeter-scale two-dimensional defect-free photonic crystal slabs with quality factors bigger than 10,000 in the visible, together with a unique way to quantify their quality factors. We fabricate Si(3)N(4) photonic crystal slabs, and perform an angle-resolved reflection measurement. This measurement data is used to… CONTINUE READING