Fabricating Microbolometer Array on Unplanar Readout Integrated Circuit

@article{Wang2005FabricatingMA,
  title={Fabricating Microbolometer Array on Unplanar Readout Integrated Circuit},
  author={Hongcheng Wang and X. Yi and J. Lai and Y. Li},
  journal={International Journal of Infrared and Millimeter Waves},
  year={2005},
  volume={26},
  pages={751-762}
}
  • Hongcheng Wang, X. Yi, +1 author Y. Li
  • Published 2005
  • Materials Science
  • International Journal of Infrared and Millimeter Waves
In this paper, the integration of an experimental 32 × 32 uncooled IR microbolometer array with an unplanar CMOS Readout Integrated Circuit (ROIC) is presented. A vanadium oxide film fabricated by low temperature reactive ion beam sputtering is utilized as thermal-sensitive material in the bolometric detectors Before the integration, the unplanar ROIC for commercial use is first planarized by bisbenzocyclobutene film, then a electroless nickel-plating on ohmic contact areas is accomplished… Expand
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