author={Ankur M. Mehta and Kristofer S. J. Pister},
This work examines the design of legs for a walking microrobot. The parameterized force-displacement relationships of planar serpentine flexure-based two degree-of-freedom legs are analyzed. An analytical model based on Euler-Bernoulli beam theory is developed to explore the design space, and is subsequently refined to include contact between adjacent beams. This is used to determine a successful leg geometry given dimensional constraints and actuator limitations. Standard comb drive actuators… 

Planar Two Degree-of-Freedom Legs for Walking Microrobots

This work presents initial progress towards an autonomous integrated walking microrobot. Design goals include driving a 1 mN (100 mg), 1 cm device at speeds on the order of 1 cm/s over smooth

First steps of a millimeter-scale walking silicon robot

  • D. ContrerasD. DrewK. Pister
  • Engineering
    2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
  • 2017
This work presents the locomotion of a ground-based single-legged silicon robot. The robot measures 5mm × 6mm × 0.5mm and weighs 18mg. Fabricated in a silicon-on-insulator (SOI) process, the robot is

Design of an Autonomous Jumping Microrobot

Initial tests with a probe-loaded robot prototype have demonstrated a microrobot which can potentially jump 1.2 cm straight up, and solar cells and a microcontroller have been chosen to power and control the micRORobot.

S2worm: A Fast-Moving Untethered Insect-Scale Robot With 2-DoF Transmission Mechanism

Designing terrestrial insect-scale robot with high maneuverability and autonomy is becoming an essential challenge in the field of robotics research. Previous work has indicated that compact

Autonomous jumping microrobots

An autonomous jumping microrobot has been designed, and its mechanical components have been fabricated and tested. Millimeter-scale autonomous mobile microrobots have potential applications in mobile

Dynamics of electrostatic inchworm motors for silicon microrobots

  • D. ContrerasK. Pister
  • Engineering
    2017 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
  • 2017
We present work on characterizing the speed of electrostatic actuators for applications in microelectromechanical systems (MEMS) based microrobotics. The actuators are based on electrostatic gap

Durability of silicon pin-joints for microrobotics

  • D. ContrerasK. Pister
  • Engineering
    2016 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
  • 2016
This work presents the initial characterization of planar silicon pin-joints for use in linkages for walking microrobot legs. A major goal in walking microrobotics is the creation of robust leg



Robot leg motion in a planarized-SOI, two-layer poly-Si process

With the ultimate goal of creating autonomous microrobots, we developed a five-mask process that combines two polysilicon structural layers with 50-/spl mu/m-thick SOI structures and a backside

A bioinspired concept for high efficiency locomotion in micro robots: the jumping Robot Grillo

Passive compliant legs and low-power actuation result in light, efficient micro-robot, designed to have long autonomy for environment exploration and monitoring.

An untethered, electrostatic, globally controllable MEMS micro-robot

We present an untethered, electrostatic, MEMS micro-robot, with dimensions of 60 /spl mu/m by 250 /spl mu/m by 10 /spl mu/m. The device consists of a curved, cantilevered steering arm, mounted on an

A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities-Part i: design and analysis

This paper proposes a new single-layer electrostatic microactuator design that generates three-axis motion resulting in vertical translation and out-of-plane tilting. The new actuator design combines

Out of plane motion of assembled microstructures using a single-mask SOI process

  • M. LastV. SubramaniamK. Pister
  • Engineering
    The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
  • 2005
We demonstrate out-of-plane motion of microstructures assembled from parts fabricated in a single-mask silicon-on-insulator (SOI) process. Compliant microgrippers used during assembly, in-plane

Thrust and electrical power from solid propellant microrockets. 2. Actuators

Progress has been made in the development of flying silicon. Fully self-contained MEMS rockets have been designed, fabricated and tested. A peak thrust of 4 mN was obtained from a rocket with a mass

A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities-part II: fabrication and characterization

This paper reports on fabrication and characterization of a new electrostatic microactuator that achieves out-of-plane multi-axis motion with a single silicon device layer. The multi-axis motion with

Repeated resonances in folded-back beam structures