FIB failure analysis of memory arrays

Abstract

Many modern microelectronic chips contain embedded memory arrays. A typical memory bit-cell contains several transistors. Failure of a single transistor or contact within a bit cell makes the entire bit cell inoperable. A dual-beam Focused Ion Beam (FIB) tool combines milling capability with in situ Scanning Electron Microscope (SEM) imaging, which is very… (More)

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14 Figures and Tables