FEM/BEM simulation and experimental study of LLSAW resonator characteristics on YZ-LiNbO/sub 3/

@article{Makkonen2002FEMBEMSA,
  title={FEM/BEM simulation and experimental study of LLSAW resonator characteristics on YZ-LiNbO/sub 3/},
  author={Tapani Makkonen and Victor P. Plessky and Valeri I. Grigorievski and Laurent Kopp and Marc Solal and William Steichen and Martti M. Salomaa},
  journal={2002 IEEE Ultrasonics Symposium, 2002. Proceedings.},
  year={2002},
  volume={1},
  pages={317-320 vol.1}
}
The high velocity (above 6000 m/s in LiNbO/sub 3/) of the longitudinal leaky SAW (LLSAW) mode makes it attractive for use in high frequency SAW devices in the 2-3 GHz range. We have investigated, both experimentally and theoretically, the dependence of one-port LLSAW resonator performance on YZ-LiNbO/sub 3/ on the metallization thickness and metallization ratio. The results indicate a strong dependence of the Q factor and resonance frequency on the aluminum thickness. The observed behaviour is… CONTINUE READING

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