Extremely High gm> 2.2 S/mm and fT> 550 GHz in 30-nm Enhancement-Mode InP-HEMTs with Pt/Mo/Ti/Pt/Au Buried Gate

@article{Shinohara2007ExtremelyHG,
  title={Extremely High gm> 2.2 S/mm and fT> 550 GHz in 30-nm Enhancement-Mode InP-HEMTs with Pt/Mo/Ti/Pt/Au Buried Gate},
  author={Keisuke Shinohara and Wonill Ha and M. Rodwell and Berinder Brar},
  journal={2007 IEEE 19th International Conference on Indium Phosphide & Related Materials},
  year={2007},
  pages={18-21}
}
We have successfully developed 30-nm enhancement-mode (E-mode) InGaAs/InAlAs high electron mobility transistors (HEMTs) with an extremely high transconductance (gm ) of 2.22 S/mm, a current gain cutoff frequency (fT) of 554 GHz, and a maximum oscillation frequency (fmax ) of 358 GHz. The excellent high-speed performance was obtained by using a Pt/Mo/ Ti/Pt/Au buried gate technology, which enabled E-mode operation for very short 30-nm HEMTs while maintaining a low access resistance as well as a… CONTINUE READING