Extreme ultraviolet scatterometer: design and capability.


A scatterometer capable of plane-of-incidence bidirectional reflectance distribution function (BRDF) measurements at extreme ultraviolet wavelengths between 58.4 and 121.6 nm has been developed. This instrument has a lower measurement limit of approximately 10(-5) sr(-1), and it is able to accommodate angles of incidence between 10 degrees and 75 degrees… (More)