Externally resonated linear microvibromotor for microassembly

  title={Externally resonated linear microvibromotor for microassembly},
  author={Kazuhiro Saitou and D. Wang and S. J. Wou},
  journal={Journal of Microelectromechanical Systems},
A new method for on-substrate fine positioning of microscale/mesoscale discrete components is presented, where component positions are finely adjusted using microlinear sliders and fixtures on the substrate. Each microlinear slider is actuated by vibratory impacts exerted by two pairs of microcantilever impacters. These microcantilever impacters are selectively resonated by shaking the entire substrate with a piezoelectric vibrator, requiring no need for built-in driving mechanisms such as… CONTINUE READING
Highly Cited
This paper has 20 citations. REVIEW CITATIONS


Publications citing this paper.
Showing 1-10 of 15 extracted citations


Publications referenced by this paper.
Showing 1-10 of 31 references

Externally - resonated linear micro vibromotors for micro assembly

K. Saitou, S. J. Wou
Proc . SPIE . Microrobot . Micromanipulation Conf • 1998

Hexsil tweezers for teleoperated microassembly

C. G. Keller, R. T. Howe
Microelectromechanical Systems • 1997

Hexsil tweezers for teleoperated microassembly," in Microelectromechanical Systems, pp. 72—77

C. Keller, R. Howe
View 1 Excerpt

Self - orienting fluidic transport ( SOFT ) assembly of liquid crystal displays , ” presented at the Defence Manufact

M. A. Hadley

Three - dimensional self - assembly of millimeterscale components

N. Bowden A. Terfort, G. M. Whitesides
Nature • 1997

Similar Papers

Loading similar papers…