Externally resonated linear microvibromotor for microassembly

@article{Saitou2000ExternallyRL,
  title={Externally resonated linear microvibromotor for microassembly},
  author={Kazuhiro Saitou and D. Wang and S. J. Wou},
  journal={Journal of Microelectromechanical Systems},
  year={2000},
  volume={9},
  pages={336-346}
}
A new method for on-substrate fine positioning of microscale/mesoscale discrete components is presented, where component positions are finely adjusted using microlinear sliders and fixtures on the substrate. Each microlinear slider is actuated by vibratory impacts exerted by two pairs of microcantilever impacters. These microcantilever impacters are selectively resonated by shaking the entire substrate with a piezoelectric vibrator, requiring no need for built-in driving mechanisms such as… CONTINUE READING
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