Extension of UML and Its Conversion to Petri Nets for Semiconductor Manufacturing Modeling

@inproceedings{Jeng2002ExtensionOU,
  title={Extension of UML and Its Conversion to Petri Nets for Semiconductor Manufacturing Modeling},
  author={MuDer Jeng and WeiZhao Lu},
  booktitle={ICRA},
  year={2002}
}

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