Extending fault-based testing to microelectromechanical systems

  title={Extending fault-based testing to microelectromechanical systems},
  author={Salvador Mir and Beno{\^i}t Charlot and Bernard Courtois},
  journal={European Test Workshop 1999 (Cat. No.PR00390)},
As stable fabrication processes for microelectromechanical systems (MEMS) emerge, research efforts shift towards the design of systems of increasing complexity. The ways in which testing is going to be performed for large volume complex devices embedding MEMS are not known. As in the microelectronics industry the development of cost-effective tests for larger systems may well require test stimuli targeting actual faults, developing fault lists and fault models for realistic manufacturing… CONTINUE READING
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Publications referenced by this paper.
Showing 1-10 of 18 references

and B

A. Castillejo, D. Veychard, S. Mir, J. Karam
Courtois, “Failure Mechanisms and Fault Classes for CMOS-Compatible Microelectromechanical Systems,” IEEE International Test Conference , Washington DC, USA, • 1998
View 1 Excerpt

Development of a MEMS Testing Methodology

A. Richardson Olbrich, B. Straube, A. Holubek

and G

T. Mukherje
Fedder, “Structured Design of Microelectromechanical Systems,” 34th Design Automation Conference , Anaheim, USA, • 1997
View 1 Excerpt

and A

W. Vermeiren, B. Straube
Holubek, “Defect-Oriented Experiments in Fault Modeling and Fault Simulation of Microsystem Components,” IEEE European Design and Test Conference, Paris, France, • 1996
View 1 Excerpt

and K

D. Koester, R. Mahadevan, A. Shishkoff
Markus, Smart MUMPS Design Handbook , MEMS Technology Applications Center MCNC, • 1996
View 1 Excerpt

and W

T. Olbrich, A. Richardson, B. Straube
Vermeiren, “Integrated Test Support for Micro-Electro-Mechanical-Systems (MEMS),” 5th International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components , Potsdam, Germany, • 1996
View 1 Excerpt

“ Reference Manual for ICs , MEMS and MCMs Manufacturing , ” Multi - Project Circuits ( CMP ) Service

A. Shishkoff
Structured Design of Microelectromechanical Systems , ” 34 th Design Automation Conference • 1996

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