Expert System for ASIC Imaging

  title={Expert System for ASIC Imaging},
  author={Shri N. Gupta and Khalil Arshak and P. M. Mcdonnell and Conor Boyce and Andrew Duggan},
  booktitle={Advanced Lithography},
With the developments in the techniques of artificial intelligence over the last few years, development of advisory, scheduling and similar class of problems has become very convenient using tools such as PROLOG. In this paper an expert system has been described which helps lithographers and process engineers in several ways. The methodology used is to model each work station according to its input, output and control parameters, combine these work stations in a logical sequence based on past… CONTINUE READING