Experimental characterization of a micro-scale thin film evaporative cooling device

  title={Experimental characterization of a micro-scale thin film evaporative cooling device},
  author={Shankar Narayanan and Andrei G. Fedorov and Yogendra K. Joshi},
  journal={2010 12th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems},
A MEMS-NEMS cooling device based on gas-assisted, thin-film evaporation and its experimental performance characterization are presented, aiming to dissipate large heat fluxes at low junction temperature for thermal management of hot spots in microprocessors. The salient feature of this cooling scheme that distinguishes it from other currently used microfluidic cooling techniques is an efficient combination of heat and mass transfer modes to maximize the rate of convective heat transfer and… CONTINUE READING
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