Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test

  title={Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test},
  author={Z. C. Leseman and S. P. Carlson and T. R. Mackin},
  journal={Journal of Microelectromechanical Systems},
In this paper, we present experimental measurements of the strain energy release rate for stiction-failed polysilicon microcantilevers using a newly developed single cantilever beam peel test. Our experiments show that dry-contacting microcantilevers adhere exclusively as tip-stuck, "arc-shaped" stiction failures, while adhesion under "wet" conditions generate exclusively "s-shaped" stiction failures. Microcantilevers were "peeled" from the substrate under displacement control using a… CONTINUE READING


Publications referenced by this paper.
Showing 1-10 of 17 references

Accurate method for determining adhesion of cantilever beams

  • M. d. Boer, T. Michalske
  • J. Appl. Phys., vol. 86, pp. 817–827, 1999.
  • 1999
Highly Influential
6 Excerpts

Adhesion of micro-cantilevers subjected to mechanical point-loading: Modeling and experiments

  • E. Jones, M. Begley, K. Murphy
  • J. Mech. Phys. Solids, vol. 51, no. 8, pp. 1601…
  • 1993
Highly Influential
3 Excerpts

Protocols for interlaminar fracture testing of composites

  • P. Davies
  • Proc. Eur. Structural Integrity Soc. (ESIS…
  • 1993
Highly Influential
4 Excerpts

A thermomechanical model for adhesion reduction of MEMS cantilevers

  • J. Rogers, T. Mackin, L. Phinney
  • J. Microelectromech. Syst., vol. 11, pp. 512–520…
  • 2002
2 Excerpts

Process yields for laser repair of aged, stiction-failed, mems devices

  • J. Rogers, L. Phinney
  • J. Microelectromech. Syst., vol. 10, pp. 280–285…
  • 2001

Ic-compatible polysilicon surface micromachining

  • J. J. Sniegowski, M. P. d. Boer
  • Annu. Rev. Mater. Sci., vol. 30, pp. 299–333…
  • 2000

Critical review: Adhesion in surface micromechanical structures

  • R. Maboudian, R. T. Howe
  • J. Vacuum Sci. Technol. B, vol. 15, pp. 1–20…
  • 1997
1 Excerpt

Elastic properties and microstructure of LPCVD polysilicon films

  • D. Maier-Schneider, A. Koprululu, S. B. Holm, E. Obermeier
  • J. Micromech. Microeng., vol. 6, pp. 436–446…
  • 1996
1 Excerpt

An Experimental and Theoretical Investigation of Delamination Resistance in Glass Fiber Reinforced Polyestere Laminates

  • S. Schennum
  • M.S. thesis, Univ. Illinois Urbana-Champaign…
  • 1995
1 Excerpt

Similar Papers

Loading similar papers…