Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test

@article{Leseman2007ExperimentalMO,
  title={Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test},
  author={Z. C. Leseman and S. P. Carlson and T. R. Mackin},
  journal={Journal of Microelectromechanical Systems},
  year={2007},
  volume={16},
  pages={38-43}
}
In this paper, we present experimental measurements of the strain energy release rate for stiction-failed polysilicon microcantilevers using a newly developed single cantilever beam peel test. Our experiments show that dry-contacting microcantilevers adhere exclusively as tip-stuck, "arc-shaped" stiction failures, while adhesion under "wet" conditions generate exclusively "s-shaped" stiction failures. Microcantilevers were "peeled" from the substrate under displacement control using a… CONTINUE READING

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